Triphibian™ absolute MEMS pressure sensor IC (analog)
MLX90830 Melexis
Based on TriphibianTM technology, the MLX90830 is a miniaturized MEMS pressure sensor handling absolute measurement of gas and liquid media from 2 to 70 bar in a robust way. Factory calibrated and analog output.
Top features
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Robust in gas and liquid media, compliant with chemical refrigerants
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+/-0.5% full scale lifetime accuracy
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Ratiometric analog output
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Fast response time (min 0.4ms)
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System in a package: MEMS, analog front-end circuitry, 16-bit microcontroller, voltage regulators and analog ratiometric back-end
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Configurable diagnostic features like internal broken connection, over voltage, under voltage etc.
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Factory calibrated and fully programmable through the connector with the PTC04 programming tool for customized calibration curves
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Extended over (+40V) and reverse (-40V) voltage capabilities (supply & output)
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Automotive temperature range (-40°C to 150°C)
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Certification
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AEC-Q100 (automotive) and AEC-Q103-002 (pressure sensor MEMS)
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ASIL compliant developed as an ASIL A SEooC (ISO 26262)
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Package RoHS compliant SOIC16 WB (XG)
Triphibian™ absolute MEMS pressure sensor IC (analog) - MLX90830
Product description
The MLX90830 is the first product to feature the new patented TriphibianTM technology. This unprecedented miniaturized MEMS pressure sensor handles measurement of gas and liquid media from 2 to 70 bar in a robust way.
Core to the MLX90830 is the Melexis’ ground-breaking TriphibianTM technology, which not only allows the MEMS (Micro Electro-Mechanical System) sensor to provide accurate measurements considerably above 5 bar, but also while in contact with liquid. This innovative combination of high pressure sensing while compatible with gas and liquid is achieved by the unique construction of the MLX90830. The sensing mechanism contains a suspended cantilever inside of an SO16 package with the diaphragm at its tip.
The suspended cantilever design of the sensor provides pressure spike immunity up to 2000 bar/msec and static burst level up to 210 bar. While the two available calibrated ranges (10 or 35 bar) are each tailored to fulfill the demands of a distinct EV thermal management system, including low/high pressure refrigeration loops. The MLX90830’s design is inherently more robust than rear-side exposed solutions, which still experience a pressure differential between the glass pedestal side and the wire bonding side. The pressure equalization principle is also valid for frozen media, allowing the MLX90830 to survive in such conditions, a first for MEMS pressure sensors.
The MLX90830 includes a sensor readout circuit, digital hardware, voltage regulators and analog output drivers. Piezo-resistive elements implanted into the membrane create a Wheatstone bridge to generate an output signal. This signal is amplified and converted into a digital format, allowing the 16-bit Digital Signal Processing (DSP) to apply temperature compensation before the result is provided as an analog output.
The sensor is equipped with advanced protective mechanisms against both overvoltage (above +40 V) and reverse voltage (below -40 V). This makes it usable for truck applications. The MLX90830 has been developed as a Safety Element out of Context (SEooC) in accordance with ISO 26262, enabling up to ASIL B system integration ensuring it meets the latest EV safety demands.
The MLX90830 is factory calibrated or fully programmable through the connector with the PTC-04 (PTC-04 DB-HALL06) for customized calibration curves. Contact your local representative for more information.
Applications examples
- Absolute pressures from 2bar to 70bar with gas and/or liquid media
- Thermal Management of Electric Vehicles
- Standalone sensors
- Embedded sensors in expansion valves
- Embedded sensors in e-compressors
- Embedded sensors in pumps
- HVAC-R systems
- Thermal Management of Electric Vehicles
Features and benefits
-
Robust in gas and liquid media, compliant with chemical refrigerants
-
+/-0.5% full scale lifetime accuracy
-
Ratiometric analog output
-
Fast response time (min 0.4ms)
-
System in a package: MEMS, analog front-end circuitry, 16-bit microcontroller, voltage regulators and analog ratiometric back-end
-
Configurable diagnostic features like internal broken connection, over voltage, under voltage etc.
-
Factory calibrated and fully programmable through the connector with the PTC04 programming tool for customized calibration curves
-
Extended over (+40V) and reverse (-40V) voltage capabilities (supply & output)
-
Automotive temperature range (-40°C to 150°C)
-
Certification
-
AEC-Q100 (automotive) and AEC-Q103-002 (pressure sensor MEMS)
-
ASIL compliant developed as an ASIL A SEooC (ISO 26262)
-
-
Package RoHS compliant SOIC16 WB (XG)
Documents and tools
Application note(s)
Datasheet(s)
Product flyer(s)
Selection guide(s)
Environmental
Tools
IC handling and assembly
Related tech talks
Videos
Melexis Triphibian™ revolutionizes the world of MEMS pressure sensors
Melexis launches the MLX90830, its first product to feature the new patented TriphibianTM technology. This unprecedented miniaturized MEMS pressure sensor handles gas and liquid media measurement from 2 to 70 bar in a robust way. The factory-calibrated device measures the absolute pressure and delivers a proportional analog output signal. The MLX90830 makes the module cost-effective by simplifying the system integration into the latest electric vehicles (EVs) thermal management systems.
